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MNX

Thermal: Page 4 of 4

Process Hierarchy

  • Bonding
  • Clean
  • Consulting
  • Deposition
  • Doping
  • Etch
  • LIGA
  • Lift off
  • Lithography
  • Mask making
  • Metrology
  • Miscellaneous
  • Packaging
  • Polishing
  • Process technologies
  • Thermal
  • Anneal
  • Bake
  • Oxidation
  • Unique capabilities
per page
Process
Post-exposure bake (automated)
Wet TCA oxidation
Wet oxidation
Anneal
Bake
Dehydration bake
Dry oxidation
Hardbake
Nitride growth
Oxidation
Post-exposure bake
Rapid thermal anneal
Rapid thermal oxidation
Softbake
Wet oxidation
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