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MNX

Mask making: Page 2 of 2

Process Hierarchy

  • Bonding
  • Clean
  • Consulting
  • Deposition
  • Doping
  • Etch
  • LIGA
  • Lift off
  • Lithography
  • Mask making
  • Metrology
  • Miscellaneous
  • Packaging
  • Polishing
  • Process technologies
  • Thermal
  • Unique capabilities
Mask making
Process for fabrication of glass masks for lithography and graphite masks for LIGA processes.
per page
Process
1X maskmaking (Pattern Generation)
5X reticle making (Pattern Generator)
1X LPG maskmaking (CD=1.5um)
1X LPG maskmaking (CD=3.0um)
E-beam mask-making
Laser-writing
Mask-making
Pattern generation
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