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MNX

Mask making: Page 1 of 2

Process Hierarchy

  • Bonding
  • Clean
  • Consulting
  • Deposition
  • Doping
  • Etch
  • LIGA
  • Lift off
  • Lithography
  • Mask making
  • Metrology
  • Miscellaneous
  • Packaging
  • Polishing
  • Process technologies
  • Thermal
  • Unique capabilities
Mask making
Process for fabrication of glass masks for lithography and graphite masks for LIGA processes.
per page
Process
X-ray mask making
1X maskmaking with image repeater
1X LPG mask (High resolution)
1X LPG mask (standard)
1X PG mask
Layout generation
Mask layout
Mask review
1X E-beam mask
4X E-beam XLS reticle mask
4X E-beam reticle mask (Micrascan3)
5X E-beam ASML reticle mask
5x GCA E-beam reticle
1X LPG L10 mask
1X LPG L625 mask
Pattern Generation - Chrome - 10x
Pattern Generation - Chrome - 1x
Pattern Generation - Emulsion - 10x
Pattern Generation - Emulsion - 1x
1X maskmaking (Image Repeater)
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