| Photoresist strip (metal) |
| Photoresist strip (non-metal) |
| Polysilicon plasma etch (isotropic) |
| Resist ash |
| Photoresist descum |
| Aluminum wet etch |
| BCB Dry Etch |
| Chromium wet etch |
| Copper wet etch |
| Gold wet etch |
| Photoresist wet strip |
| Titanium wet etch |
| Polysilicon wet etch |
| Xenon difluoride (XeF2) Isotropic Si etch |
| Aluminum etch |
| Buffered oxide etch |
| Chromium wet etch |
| Gold etch |
| HF etch |
| Photoresist ashing (non-clean -March) |
