| Advanced silicon dioxide etch (AOE) with photolithography |
| Silicon DRIE with photolithography (Unaxis VLR 700) |
| Silicon DRIE with photolithography (PlasmaTherm 770) |
| Deep RIE (Bosch process) |
| Deep RIE (Bosch process) with photolithography |
| Silicon DRIE |
| Silicon DRIE with anti-footing SOI |
| Silicon DRIE |
| Advanced oxide etch |
| DRIE (PT DSE) |
| Silicon DRIE (Bosch Process) |
| Silicon DRIE (Bosch Process) Plasma Therm 770 |
| Silicon DRIE - No Lag (Etch rate independent of feature size) |
| SiC RIE (AOE) |
| silicon DRIE (Bosch Process) |
| Silicon DRIE |
| Silicon RIE (smooth sidewalls) |
| Silicon deep RIE |
| Silicon oxide dry etch |
| Advanced Oxide Etch (STS-AOE) |
